By Vijay K. Varadan, K. J. Vinoy, K. A. Jose
Microelectromechanical platforms (MEMS) discuss with a set of micro-sensors and actuators, which may react to environmental switch below micro- circuit regulate. the mixing of MEMS into conventional Radio Frequency (RF) circuits has led to platforms with better functionality degrees and reduce production expenses. The incorporation of MEMS established fabrication applied sciences into micro and millimeter wave platforms bargains plausible routes to ICs with MEMS actuators, antennas, switches and transmission traces. the consequent structures function with an elevated bandwidth and elevated radiation potency and feature substantial scope for implementation in the increasing region of instant own communique units. this article offers innovative insurance of this more and more very important region and highlights the overlapping info requisites of the RF and MEMS examine and improvement groups. * offers an creation to micromachining concepts and their use within the fabrication of micro switches, capacitors and inductors * comprises assurance of MEMS units for instant and Bluetooth enabled platforms crucial studying for RF Circuit layout practitioners and researchers requiring an creation to MEMS applied sciences, in addition to practitioners and researchers in MEMS and silicon know-how requiring an advent to RF circuit layout.
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Additional info for RF Mems & Their Applications
Some such approaches are presented in Chapter 9. , 1994, ‘The mechanism of anisotropic silicon etching process for microelectromechanical structures’, Sensors and Actuators, A, 40, pp. 63–70. , 1998, ‘Micromachined planar inductors on silicon wafers for MEMS applications’, IEEE Transactions on Industrial Electronics 45(6): 866–876. , 1999, ‘Re-configurable fluid circuits by PDMS elastomer micromachining’, in Proceedings of IEEE MEMS ’99 , IEEE, Washington, DC: 222–227. , 1997, ‘High-temperature ceramic pressure sensor’, Sensors and Actuators A: Physical 60: 72–75.
Therefore an electrostatic actuation scheme is the most preferred for microactuators. In addition to the parallel plate scheme described above, comb drives are also popular in these devices. Their operational mechanism will be discussed in Chapter 5. 5 Electromagnetic transducers The magnetic counterpart of a moving plate capacitor is a moving coil inductor. This is yet another energy-storing transducer, the difference in this case being the forms of energy are magnetic and mechanical. 11 (Rossi, 1988).
1 Piezoelectric transducers When subjected to mechanical stress, certain anisotropic crystalline materials generate charge. This phenomenon, discovered in 1880 by Jaques and Pierre Curie, is known as piezoelectricity. This effect is widely used in ultrasonic transducers. Lead zirconate titanates (PZTs) are the most common ceramic materials used as piezoelectric transducers. These crystals contain several randomly oriented domains if no electric potential is applied during the fabrication process of the material.
RF Mems & Their Applications by Vijay K. Varadan, K. J. Vinoy, K. A. Jose